Springer
Precision Nanometrology (English, Wei Gao)
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About the Book
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and d…
ISBN: 9781849962537
Book Specifications
| ISBN-13 | 9781849962537 |
| ISBN-10 | 1849962537 |
| Publisher | Springer |
| Category | Springer |
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